多层商标薄膜-多层薄膜材料设计？(2)
时间:2022-11-01 21:33
材料，在K，基底上制备了400一1100nm宽带增透膜。并用分光光度计测量了薄膜的透 过率，得到透过率光谱曲线。所镀膜层在垂直入射时，400一1100纳米波段平均反射率 小于1.5%。对制备的增透膜进行了各种环境测试，环境测试结果显示，膜层的各项 指标都达到了设计要求。 关键词:光学薄膜;大气辐射系统;宽带增透膜;离子辅助; ABSTRACT InordertomeettheoPtiealinstruments’oPeratingrequirementsofatmosPheriC radiationsystems，namely，itmustbehightransmittaneeduringvisibleandnear一infrared band，weadoPtelectroniebeamingvacuumdePositingmethodwiththeaidofionassistant dePositionsystems.Thestructure15designedbyTFCsoftwarewithdoubleeffieieney interfaeetheory.ThroughoPtimizingteehniealParameterssuehasdegreeofvacuum，base reservoirtemPerature，evaPorationrateofTIOZandimProvingthemonitormethod，we dePositthefilmonthekgsubstratewithfourmaterialsofA1203，加烤凡，TIO:，510:.And measuredthetransmittaneeoftheeoatingwiththesPeetralPhotometer，gotthesPectrum eurvesoftheeoating.Inconditionofvertiealineidenee，theaveragerefleetivitybelow1.5% through400nm一1100nmwavelength.Inaddition，thecoatinghavesuccessfullyPassed environmentaltests，iteaneomPletelymeetthedemandsofatmosPherieradiationsystems. 价ywords:oPtiealthinfilm;atmosPherieradiationsystems:broadbandARcoating; ionassistantdePosition(IAD); 目录 摘要 ABSTRACT 目录 第一章绪论........................................................................................................................……，……1 1.1薄膜的发展.................................……，...............................……，..............•......••...•.....••••........……1 1.2宽带增透膜的发展及应用.‘、‘一...一....................................................................................……1 1.3论文研究的内容......................................................................•••••••••••••••••••••••••••••••••••••••••••……2 第二章薄膜设计理论....................................................……‘…‘二‘一，.”...”..................................……4 2.1光学薄膜的特性计算........................................................................................................……4 2.2双有效界面法........................................................................••••••..••.••••••••••••••••••••••“••••••••••一8 2.3介质多层膜的弱吸收计算.......……，，................................................……。.......................……10 第三章增透膜设计理论..........................................................................................................……13  |